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dc.contributor.author강호관-
dc.contributor.author하원호-
dc.contributor.author박철우-
dc.contributor.author김병규-
dc.contributor.author문성욱-
dc.contributor.author김도훈-
dc.date.accessioned2015-12-02T05:25:13Z-
dc.date.available2015-12-02T05:25:13Z-
dc.date.issued200009-
dc.identifier.citationVOL 4174, 346-353-
dc.identifier.issn0277-786X-
dc.identifier.other13407-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/17007-
dc.publisherProceedings of SPIE-Micromachining and Microfabrication Process Technology VI-
dc.subjectMEMS-
dc.subjectmicrobolometer-
dc.subjectthemal isolution structure-
dc.subjectSiNx-
dc.subjectVOx-
dc.subjectIR-
dc.subjectsurface micromachining-
dc.subjectsacrificial layer-
dc.subjectvanadium oxide-
dc.subjectfloating structure-
dc.titleImprovement of structural stability and IR detecting characteristics of microbolometer-
dc.typeConference Paper-
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