Design and fabrication of a micromechanical inverter

Title
Design and fabrication of a micromechanical inverter
Authors
채경수한승오송민석문성욱박정호
Keywords
mechanical inverter; MEMS; micromechanical switch; electrostatic actuator; surface micromachining
Issue Date
2000-09
Publisher
Proceedings of SPIE-Micromachining and Microfabrication Process Technology VI
Citation
VOL 4174, 508-514
URI
http://pubs.kist.re.kr/handle/201004/17012
Appears in Collections:
KIST Publication > Conference Paper
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