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dc.contributor.author채경수-
dc.contributor.author한승오-
dc.contributor.author송민석-
dc.contributor.author문성욱-
dc.contributor.author박정호-
dc.date.accessioned2015-12-02T05:25:13Z-
dc.date.available2015-12-02T05:25:13Z-
dc.date.issued200009-
dc.identifier.citationVOL 4174, 508-514-
dc.identifier.other13384-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/17012-
dc.publisherProceedings of SPIE-Micromachining and Microfabrication Process Technology VI-
dc.subjectmechanical inverter-
dc.subjectMEMS-
dc.subjectmicromechanical switch-
dc.subjectelectrostatic actuator-
dc.subjectsurface micromachining-
dc.titleDesign and fabrication of a micromechanical inverter-
dc.typeConference Paper-
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