Design and fabrication of a micromechanical switch using polysilicon surface micromachining

Title
Design and fabrication of a micromechanical switch using polysilicon surface micromachining
Authors
채경수한승오하종민문성욱박정호
Keywords
mechanical switch; MEMS; Logic Gate; actuator; surface micromaching
Issue Date
2000-09
Publisher
대한전기학회논문지 : 전기물성,응용부문 C; The Transactions of The Korean Institute of Electrical Engineers
Citation
VOL 49, NO 9, 546-552
URI
http://pubs.kist.re.kr/handle/201004/17025
Appears in Collections:
KIST Publication > Article
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