Design and fabrication of a micromechanical switch using polysilicon surface micromachining
- Design and fabrication of a micromechanical switch using polysilicon surface micromachining
- 채경수; 한승오; 하종민; 문성욱; 박정호
- mechanical switch; MEMS; Logic Gate; actuator; surface micromaching
- Issue Date
- 대한전기학회논문지 : 전기물성,응용부문 C; The Transactions of The Korean Institute of Electrical Engineers
- VOL 49, NO 9, 546-552
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- KIST Publication > Article
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