Deeply etched InP/InGaAsP/InP Ridge-type waveguides fabricated by using chemically assisted ion beam etching (CAIBE)

Title
Deeply etched InP/InGaAsP/InP Ridge-type waveguides fabricated by using chemically assisted ion beam etching (CAIBE)
Authors
변영태우덕하김선호정영철구본조신기철
Keywords
InP/InGaAs/InP 광도파로; CAIBE 식각기법; 직선 도파로; 곡선도파로; 삽입손실; 복사손실; 전파손실; 반사손실; 2D-FEM
Issue Date
2000-07
Publisher
새물리
Citation
VOL 41, NO 1, 41-47
URI
http://pubs.kist.re.kr/handle/201004/17078
ISSN
0374-4914
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE