Plasma source ion implantations for shallow junction

Title
Plasma source ion implantations for shallow junction
Authors
조정희한승희이연희김옥경김곤호황현상김영우임현의정혜선백성권
Keywords
shallow junction; PSII; rapid thermal annealer
Issue Date
2000-07
Publisher
제19회 한국진공학회 학술발표회
Citation
, 49-49
URI
http://pubs.kist.re.kr/handle/201004/17092
Appears in Collections:
KIST Publication > Conference Paper
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