Digital deposition of tungsten nitride thin layer by cyclic exposure of WF//6 and NH₃

Title
Digital deposition of tungsten nitride thin layer by cyclic exposure of WF//6 and NH₃
Authors
심현상김동준김용태전형탁박영균김성일
Keywords
cyclic exposure
Issue Date
2000-06
Publisher
The International Conference on Electrical Engineering 2000
Citation
, 774-777
URI
http://pubs.kist.re.kr/handle/201004/17162
Appears in Collections:
KIST Publication > Conference Paper
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