Effects of reactive ion beam treatment of sapphire surface to optimize the deposition of GaN films

Title
Effects of reactive ion beam treatment of sapphire surface to optimize the deposition of GaN films
Authors
김현정변동진김긍호금동화
Keywords
reactive ion beam; GaN; CBED; lattice strain; MOCVD
Issue Date
2000-06
Publisher
Journal of applied physics
Citation
VOL 87, NO 11, 7940-7945
URI
http://pubs.kist.re.kr/handle/201004/17166
ISSN
0021-8979
Appears in Collections:
KIST Publication > Article
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