Fabrication and electrochemical characterization of all soild-state thin films micro-battery by in-situ sputtering
- Fabrication and electrochemical characterization of all soild-state thin films micro-battery by in-situ sputtering
- 전은정; 윤영수; 남상철; 조원일; 신영화
- all soild-state; thin film micro-battery; vanadium oxide; in-situ; LiPON; lithium phosphorus oxynitride
- Issue Date
- 한국전기화학회지; Journal of the Korean Electrochemical Society
- VOL 3, NO 2, 115-120
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- KIST Publication > Article
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