Fabrication and electrochemical characterization of all soild-state thin films micro-battery by in-situ sputtering

Title
Fabrication and electrochemical characterization of all soild-state thin films micro-battery by in-situ sputtering
Authors
전은정윤영수남상철조원일신영화
Keywords
all soild-state; thin film micro-battery; vanadium oxide; in-situ; LiPON; lithium phosphorus oxynitride
Issue Date
2000-05
Publisher
한국전기화학회지; Journal of the Korean Electrochemical Society
Citation
VOL 3, NO 2, 115-120
URI
http://pubs.kist.re.kr/handle/201004/17244
ISSN
1229-1935
Appears in Collections:
KIST Publication > Article
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