Fabrication of micro-vacuum sensor using surface-macromachined lateral-type field emitter device

Title
Fabrication of micro-vacuum sensor using surface-macromachined lateral-type field emitter device
Authors
박흥우주병권이윤희박정호오명환
Keywords
MEMS
Issue Date
2000-05
Publisher
한국센서학회
Citation
VOL 9, NO 3, 182-189
URI
http://pubs.kist.re.kr/handle/201004/17270
Appears in Collections:
KIST Publication > Article
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