Pulsed DC PACVD process for 4-inch diamond wafer growth

Title
Pulsed DC PACVD process for 4-inch diamond wafer growth
Authors
이욱성은광용백영준
Keywords
CVD diamond
Issue Date
2000-04
Publisher
The Int. Conf. On Metallurgical Coatings and Thin Films, April 10-14, 2000, San Diego, California, U
Citation
, ?-?
URI
http://pubs.kist.re.kr/handle/201004/17281
Appears in Collections:
KIST Publication > Conference Paper
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