Fabrication of piezoresistive pressure sensor based on poly-Si

Title
Fabrication of piezoresistive pressure sensor based on poly-Si
Authors
임재홍윤석진윤영수
Keywords
prezoresistivity
Issue Date
2000-04
Publisher
Materials Research society
Citation
, 45-45
URI
http://pubs.kist.re.kr/handle/201004/17312
Appears in Collections:
KIST Publication > Conference Paper
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