Vacuum-electrostatic bonding properties of glass-to-glass substrates

Title
Vacuum-electrostatic bonding properties of glass-to-glass substrates
Authors
주병권이덕중이윤희
Keywords
wafer bonding
Issue Date
2000-04
Publisher
마이크로전자 및 패키징학회지; Journal of Microelectronics and Packaging Society
Citation
VOL 7, NO 1, 7-12
URI
http://pubs.kist.re.kr/handle/201004/17324
ISSN
1226-9360
Appears in Collections:
KIST Publication > Article
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