MOCVD deposition of AlN thin film for packaging materials

Title
MOCVD deposition of AlN thin film for packaging materials
Authors
안창규최승철조성훈한성환경제홍
Keywords
MOCVD; AlN; single precusor
Issue Date
2000-03
Publisher
마이크로전자 및 패키징학회지
Citation
VOL 7, NO 1, 13-13
URI
http://pubs.kist.re.kr/handle/201004/17343
Appears in Collections:
KIST Publication > Conference Paper
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