스퍼터링 박막공정

Title
스퍼터링 박막공정
Authors
이전국
Keywords
스퍼터링
Issue Date
2000-02
Publisher
세라미스트
Citation
VOL 3, NO 1, 7-10
URI
http://pubs.kist.re.kr/handle/201004/17391
Appears in Collections:
KIST Publication > ETC
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