Etching behavior of GaAs/AlGaAs multilayer structure during laser beam scanning
- Etching behavior of GaAs/AlGaAs multilayer structure during laser beam scanning
- 박세기; 이천; 김은규
- thermochemical etching; GaAs/AlGaAs multilayer; thermal confinement; local temperature rise; etched width ratio
- Issue Date
- Journal of electronic materials
- VOL 29, NO 2, 195-198
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- KIST Publication > Article
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