Etching behavior of GaAs/AlGaAs multilayer structure during laser beam scanning

Title
Etching behavior of GaAs/AlGaAs multilayer structure during laser beam scanning
Authors
박세기이천김은규
Keywords
thermochemical etching; GaAs/AlGaAs multilayer; thermal confinement; local temperature rise; etched width ratio
Issue Date
2000-02
Publisher
Journal of electronic materials
Citation
VOL 29, NO 2, 195-198
URI
http://pubs.kist.re.kr/handle/201004/17399
ISSN
0361-5235
Appears in Collections:
KIST Publication > Article
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