Plasma source ion implantations for shallow p+/n junction

Title
Plasma source ion implantations for shallow p+/n junction
Authors
조정희한승희이연희김옥경김곤호김영우임현의서무진
Keywords
plasma source ion implantation; shallow p+/n junction; electrical characteristics
Issue Date
2000-02
Publisher
제18회 한국진공학회 학술발표회
Citation
, 180-180
URI
http://pubs.kist.re.kr/handle/201004/17404
Appears in Collections:
KIST Publication > Conference Paper
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE