Residual stress evaluation through improved curvature method by considering plastic deformation effect of substrate in CVD diamond film

Title
Residual stress evaluation through improved curvature method by considering plastic deformation effect of substrate in CVD diamond film
Authors
정증현김용협백영준권동일
Keywords
Diamond film; Residual stress; Plastic deformation; Diamond etching; Nondiamond phase; Stress gradient
Issue Date
2000-12
Publisher
대한금속 . 재료학회지; Journal of the Korean Institute of Metals and Materials
Citation
VOL 38, NO 12, 1675-1683
URI
http://pubs.kist.re.kr/handle/201004/17426
ISSN
1738-8228
Appears in Collections:
KIST Publication > Article
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