Characteristics of carbon incorporated BN films deposited by radio frequency PACVD

Title
Characteristics of carbon incorporated BN films deposited by radio frequency PACVD
Authors
김홍석최인훈백영준
Keywords
carbon incorporated BN; r.f. PACVD; B-C-N bonds; stability
Issue Date
2000-12
Publisher
Surface & coatings technology
Citation
VOL 133-134, 473-477
URI
http://pubs.kist.re.kr/handle/201004/17442
ISSN
0257-8972
Appears in Collections:
KIST Publication > Article
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