Sol-gel processing for epitaxial growth of ZrO2 thin films on Si(100) wafers

Title
Sol-gel processing for epitaxial growth of ZrO2 thin films on Si(100) wafers
Authors
배승영최현석최세영오영제
Keywords
sol-gel; epitaxial growth; ZrO2 thin film
Issue Date
2000-11
Publisher
Ceramics international
Citation
VOL 26, NO 2, 213-214
URI
http://pubs.kist.re.kr/handle/201004/17458
ISSN
0272-8842
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE