Packaging of the vacuum magnetic field sensors

Title
Packaging of the vacuum magnetic field sensors
Authors
박흥우이덕중박정호오명환주병권
Keywords
MEMS; Packaging; vacuum; magnetic sensors
Issue Date
2000-11
Publisher
센서학회 종합학술대회; Sensors Conference 2000
Citation
VOL 11, NO 1, 241-244
URI
http://pubs.kist.re.kr/handle/201004/17501
Appears in Collections:
KIST Publication > Conference Paper
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