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dc.contributor.author김주형-
dc.contributor.author이시형-
dc.contributor.author이전국-
dc.contributor.author안진호-
dc.date.accessioned2015-12-02T05:29:03Z-
dc.date.available2015-12-02T05:29:03Z-
dc.date.issued200011-
dc.identifier.citation, 160-164-
dc.identifier.other12240-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/17506-
dc.publisher강유전체 및 FRAM 기술 Workshop-
dc.subjectasymmetric pulsed dc-
dc.titleAsymmetric pulsed dc sputtered AIN thin film for FBAR application-
dc.typeConference Paper-
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