Electrical and structural properties of Si nanocrystals prepared by ion-beam-assisted electron beam deposition

Title
Electrical and structural properties of Si nanocrystals prepared by ion-beam-assisted electron beam deposition
Authors
K.H. ParkY. KimT.H. ChungH.J. BarkJ.Y. Yi최원철김은규
Keywords
nanocrystal Si; ion-beam-assisted electron beam deposition; TEM
Issue Date
2000-11
Publisher
Abstracts of 10th Seoul Inter. Symp. on Phys. of semicon. and Appl.
Citation
, 149-149
URI
http://pubs.kist.re.kr/handle/201004/17521
Appears in Collections:
KIST Publication > Conference Paper
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