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Improvement in the characteristics of ammonia plasma treated MSQ(Methyl Silsesquioxane)

Title
Improvement in the characteristics of ammonia plasma treated MSQ(Methyl Silsesquioxane)
Authors
심현상; 김동준; 김춘근; 김성일; 김용태; 전형탁
Keywords
MSQ; ammonia plasma treatment
Issue Date
2000-10
Publisher
Bulletin of the Korean Physical Society 2000. 10.
URI
http://pubs.kist.re.kr/handle/201004/17582
Appears in Collections:
KIST Publication > Conference Paper
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