A study for the characteristics of multi-layer VOx thin films for applying to IR absorbing layer

Title
A study for the characteristics of multi-layer VOx thin films for applying to IR absorbing layer
Authors
박철우문성욱오명환정홍배
Keywords
IR(infrared); MEMS; Microelectromechanical System; Microbolometer; TCR; Temperature coefficient of resistance
Issue Date
2000-10
Publisher
전기전자재료학회논문지
Citation
VOL 13, NO 10, 859-864
URI
http://pubs.kist.re.kr/handle/201004/17612
ISSN
1226-7945
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE