The effect of 02 plasma treatment on anodic bonding

Title
The effect of 02 plasma treatment on anodic bonding
Authors
주병권최승우최우범이윤희김병호오명환
Keywords
wafer bonding
Issue Date
2000-01
Publisher
제 7 회 반도체 학술대회
Citation
, 659-660
URI
http://pubs.kist.re.kr/handle/201004/17633
Appears in Collections:
KIST Publication > Conference Paper
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