Fabrication of piezoresistive pressure sensor based on poly-Si

Title
Fabrication of piezoresistive pressure sensor based on poly-Si
Authors
윤영수임재홍윤석진
Keywords
bulk micromachining
Issue Date
2000-01
Publisher
전자부품
Citation
VOL 1, 74-77
URI
http://pubs.kist.re.kr/handle/201004/17679
Appears in Collections:
KIST Publication > ETC
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