Microstructure of indium oxide films in oxygen ion-assisted deposition

Title
Microstructure of indium oxide films in oxygen ion-assisted deposition
Authors
조준식윤기현고석근
Keywords
indium oxide
Issue Date
2000-01
Publisher
Thin solid films
Citation
VOL 368, 111-115
URI
http://pubs.kist.re.kr/handle/201004/17730
ISSN
0040-6090
Appears in Collections:
KIST Publication > Article
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