Si-to-Si electrostatic bonding using LSG film as an interlayer

Title
Si-to-Si electrostatic bonding using LSG film as an interlayer
Authors
주병권정지원이덕중이윤희최두진오명환
Keywords
FED
Issue Date
1999-09
Publisher
전기학회논문지; Transactions of the Korean Institute of Electrical Engneers
Citation
VOL 48C, NO 9, 672-675
URI
http://pubs.kist.re.kr/handle/201004/17756
ISSN
0254-4172
Appears in Collections:
KIST Publication > Article
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