Synthesis and characterization of organic-inorganic hybrid materials incorporating viods via Sol-Gel reaction for interlayer dielectrics

Title
Synthesis and characterization of organic-inorganic hybrid materials incorporating viods via Sol-Gel reaction for interlayer dielectrics
Authors
백남석김환규황승상홍순만
Keywords
organic-inorganic hybrid
Issue Date
1999-09
Publisher
The 10th Korea-Japan Joint Forum (KJF'99)
Citation
, 107-107
URI
http://pubs.kist.re.kr/handle/201004/17765
Appears in Collections:
KIST Publication > Conference Paper
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