Effects of a hydrophilic surface in anodic bonding

Title
Effects of a hydrophilic surface in anodic bonding
Authors
Duck-Jung Lee주병권Jin JangKwang-Bae Lee오명환
Keywords
MEMS
Issue Date
1999-09
Publisher
Journal of micromechanics and microengineering
Citation
VOL 9, 1-6
URI
http://pubs.kist.re.kr/handle/201004/17790
ISSN
0960-1317
Appears in Collections:
KIST Publication > Article
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