Ex situ growth of the c-axis preferred oriented SrBi2Ta2O9 thin films on Pt/Ti/SiO2/Si substrates

Title
Ex situ growth of the c-axis preferred oriented SrBi2Ta2O9 thin films on Pt/Ti/SiO2/Si substrates
Authors
배철휘이전국이시형정형진
Keywords
c-axis; SrBi2Ta2O9 thin film; ferroelectric
Issue Date
1999-09
Publisher
Journal of vacuum science & technology. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society
Citation
VOL 17, NO 5, 2957-2961
URI
http://pubs.kist.re.kr/handle/201004/17793
ISSN
0734-2101
Appears in Collections:
KIST Publication > Article
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