Free-standing diamond wafers deposited by single-and multi-cathode direct-current plasma assisted CVD

Title
Free-standing diamond wafers deposited by single-and multi-cathode direct-current plasma assisted CVD
Authors
은광용이재갑이욱성백영준
Keywords
CVD; DC plasma; dialmond film; large area deposition
Issue Date
1999-09
Publisher
Proceedings of ADC/FCT '99 : 5th International Conference on the Applications of Diamond Films and R
Citation
, 175-178
URI
http://pubs.kist.re.kr/handle/201004/17795
Appears in Collections:
KIST Publication > Conference Paper
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