Fabrication of CVD SiC double layer structure from the microstructural change through input gas ratio

Title
Fabrication of CVD SiC double layer structure from the microstructural change through input gas ratio
Authors
오정환왕채현최두진송휴섭
Keywords
SiC; microstructure; preferred orientation; double layer structure
Issue Date
1999-09
Publisher
한국세라믹학회지; Journal of the Korean Ceramic Society
Citation
VOL 36, NO 9, 937-945
URI
http://pubs.kist.re.kr/handle/201004/17817
ISSN
1229-7801
Appears in Collections:
KIST Publication > Article
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