Photoacid-generating sulfonyloxymaleimide polymers and their application to photoimaging

Title
Photoacid-generating sulfonyloxymaleimide polymers and their application to photoimaging
Authors
안광덕정찬문
Keywords
photoacid generation; sulfonyloxymaleimide; polymeric photoacid generator; photoimaging; chemical amplification; photopolymers; photoresist
Issue Date
1999-08
Publisher
Macromolecular symposia
Citation
VOL 142, NO 1, 145-157
URI
http://pubs.kist.re.kr/handle/201004/17833
ISSN
1022-1360
Appears in Collections:
KIST Publication > Article
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