Photoacid-generating sulfonyloxymaleimide polymers and their application to photoimaging
- Photoacid-generating sulfonyloxymaleimide polymers and their application to photoimaging
- 안광덕; 정찬문
- photoacid generation; sulfonyloxymaleimide; polymeric photoacid generator; photoimaging; chemical amplification; photopolymers; photoresist
- Issue Date
- Macromolecular symposia
- VOL 142, NO 1, 145-157
- Appears in Collections:
- KIST Publication > Article
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