Single precursor MOCVD of aluminum nitride

Title
Single precursor MOCVD of aluminum nitride
Authors
경제홍최승철조성훈한성환
Keywords
MOCVD; AlN; Single precursor; RBS; AES
Issue Date
1999-08
Publisher
Proceedings of Inorganic Chemistry Symposium
Citation
VOL VI, 85-86
URI
http://pubs.kist.re.kr/handle/201004/17839
Appears in Collections:
KIST Publication > Conference Paper
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