Micro-tunneling sensors for vacuum level evaluation of field emission display devices

Title
Micro-tunneling sensors for vacuum level evaluation of field emission display devices
Authors
박흥우주병권박윤권김철주박정호오명환
Keywords
FED; FEA; MEMS
Issue Date
1999-07
Publisher
IVMC '99
Citation
, 340-341
URI
http://pubs.kist.re.kr/handle/201004/17869
Appears in Collections:
KIST Publication > Conference Paper
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