Direct nanometer-scale patterning by the cantilever oscillation of an atomic force microscope

Title
Direct nanometer-scale patterning by the cantilever oscillation of an atomic force microscope
Authors
현찬경S.C. Choi황성우안도열김용김은규
Keywords
AFM
Issue Date
1999-07
Publisher
Applied physics letters
Citation
VOL 75, NO 2, 292-294
URI
http://pubs.kist.re.kr/handle/201004/17916
ISSN
0003-6951
Appears in Collections:
KIST Publication > Article
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