A study for fabrication of microbolometer using by vanadium oxide thin films

Title
A study for fabrication of microbolometer using by vanadium oxide thin films
Authors
김민철박근우강호관심태석문성욱김도훈오명환
Keywords
microbolometer; vanadium oxide; TCR
Issue Date
1999-07
Publisher
1999 제 1 회 MEMS 학술대회 논문집; 1999 Proceedings of the 1st Korean MEMS conference
Citation
, 241-247
URI
http://pubs.kist.re.kr/handle/201004/17930
Appears in Collections:
KIST Publication > Conference Paper
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