Etching effect of carbon tetrabromide in the vertical growth of GaAs during metalorganic chemical vapor deposition

Title
Etching effect of carbon tetrabromide in the vertical growth of GaAs during metalorganic chemical vapor deposition
Authors
박영균김성일손창식
Keywords
GaAs; tetrabromide; etching effect; metalorganic chemical vapor deposition
Issue Date
1999-06
Publisher
Journal of the Korean Physical Society
Citation
VOL 34, S432-S434
URI
http://pubs.kist.re.kr/handle/201004/17943
ISSN
0374-4884
Appears in Collections:
KIST Publication > Article
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