Thermodynamic study of stress distribution in epitaxial Pb(Zr,Ti)O₃ (PZT) thin films

Title
Thermodynamic study of stress distribution in epitaxial Pb(Zr,Ti)O₃ (PZT) thin films
Authors
김형준오성훈장현명
Keywords
thin film; PZT; stress; Thermodynamic
Issue Date
1999-06
Publisher
3rd Korea-Japan Conference on Ferroelectrics
URI
http://pubs.kist.re.kr/handle/201004/17959
Appears in Collections:
KIST Publication > Conference Paper
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