The influence of gate insulator etching on the characteristics of Mo-tip field-emitter arrays

Title
The influence of gate insulator etching on the characteristics of Mo-tip field-emitter arrays
Authors
H. Kim주병권S. Lee이윤희오명환고영욱J. Jang
Keywords
FED; FEA; MEMS
Issue Date
1999-05
Publisher
SID 99 Digest
Citation
, 930-933
URI
http://pubs.kist.re.kr/handle/201004/17961
ISSN
0099-0966
Appears in Collections:
KIST Publication > Conference Paper
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