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Issue DateTitleAuthor(s)
199301Atomic force microscopic observation in the surface morphologies and roughness of plasma deposited tungsten and tungsten nitride thin films.김용태; C. S. Kwon; I. H. Choi; C. W. Lee; 민석기
199301PECVD 법으로 형성한 W//6//7N//3//3/GaAs 구조의 열적 특성 .김용태; 민석기; 홍종성; 이세정; 이창우; 이종무
199501Effect of excess oxygen on the properties of reactive sputtered RuO//x thin films.김용태; 이정건; 조성호; 민석기
200007Fabrication of noble quantum wire structures grown by low pressure MOCVD using selective area epitaxy김성일; 김제원; 박영균; 김용태
199501질소이온 주입된 질화텅스텐박막의 구리배선용 확산방지막 특성 .김용태; 권철순; 김동준; 민석기
199501Dielectric properties of PbTiO//3 thin film capacitors deposited on tungsten nitride/tungsten bilayers.김용태; 이창우
199501Plasma deposited amorphous tungsten nitride diffusion barrier for metal-organic chemical vapor deposited Cu metallization.김용태; 이창우
199503Deposition and properties of PbTiO//3 thin films on various substrates by metal-organic chemical vapor deposition.김용태; Y. S. Yoon; C. H. Wang; S. K. Koh; S. S. Yom
199701Effects of bottom electrode on the structural and electrical properties of PbTiO//3 ferroelectric thin films이호녕; 김용태; 조성호
198801Effect of flow rate ratios of SiH//4/NH//3/N//2 and SiH//4/NH//3/Ar on the properties of PECVD SiN//x:H films.김용태; 김춘근; 민석기

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