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Issue DateTitleAuthor(s)
200307Characteristics of hydrogen ion implantation for SOI fabrication김형권; 변영태; 김태곤; 김선호; 한상국
200305Experimental study on wet thermal oxides for SOI fabrication변영태; 김형권
200305Blistering study on hydrogen ion implanted Si surface김형권; 옥성해; 김재헌; 김선호; 변영태; 한상국; 우형주
200302The growth and characteristics of wet thermal oxidation film for SOI fabrication김형권; 변영태; 김선호; 한상국; 옥성해
200310Experimental study of hydrogen-ion implantation for SOI fabrication변영태; 김형권; 김태곤
200312Experimental study of the formation of surface blisters for SOI fabrication.김형권; 변영태; 한상국
200311Experimental study on SOI fabrication using Smart-cut technology김형권; 변영태; 김선호; 한상국
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