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Results 1-7 of 7 (Search time: 0.003 seconds).
Item hits:
Issue Date
Title
Author(s)
200307
Characteristics of hydrogen ion implantation for SOI fabrication
김형권
;
변영태
;
김태곤
;
김선호
;
한상국
200305
Experimental study on wet thermal oxides for SOI fabrication
변영태
;
김형권
200305
Blistering study on hydrogen ion implanted Si surface
김형권
;
옥성해
;
김재헌
;
김선호
;
변영태
;
한상국
;
우형주
200302
The growth and characteristics of wet thermal oxidation film for SOI fabrication
김형권
;
변영태
;
김선호
;
한상국
;
옥성해
200310
Experimental study of hydrogen-ion implantation for SOI fabrication
변영태
;
김형권
;
김태곤
200312
Experimental study of the formation of surface blisters for SOI fabrication.
김형권
;
변영태
;
한상국
200311
Experimental study on SOI fabrication using Smart-cut technology
김형권
;
변영태
;
김선호
;
한상국
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-Author
5
한상국
4
김선호
2
김태곤
2
옥성해
1
김재헌
1
우형주
-Subject
5
SOI
3
Smart-cut
2
실리콘 절연체
2
이온주입
1
Blister 형성
1
Blistering
1
CMP연마
1
RBS channeling spectrum
1
SOI 제작
1
Transport of ions in matter(TRIM)
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