Design of self-ion assisted beam source (SIAB) based on electron focusing with concentric symmetrical electric field and Cu thin film growth by SIAB

Title
Design of self-ion assisted beam source (SIAB) based on electron focusing with concentric symmetrical electric field and Cu thin film growth by SIAB
Authors
송재훈김기환이충만최성창송종한정형진최원국
Keywords
self-ion assisted beam source; unvala scheme; electrostatic focusing; Cu thin film
Issue Date
1999-05
Publisher
한국진공학회지; Journal of the Korean Vacuum Society
Citation
VOL 8, NO 2, 121-126
URI
http://pubs.kist.re.kr/handle/201004/18009
ISSN
1225-8822
Appears in Collections:
KIST Publication > Article
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