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dc.contributor.author송재훈-
dc.contributor.author김기환-
dc.contributor.author이충만-
dc.contributor.author최성창-
dc.contributor.author송종한-
dc.contributor.author정형진-
dc.contributor.author최원국-
dc.date.accessioned2015-12-02T05:33:34Z-
dc.date.available2015-12-02T05:33:34Z-
dc.date.issued199905-
dc.identifier.citationVOL 8, NO 2, 121-126-
dc.identifier.issn1225-8822-
dc.identifier.other11092-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/18009-
dc.publisher한국진공학회지-
dc.publisherJournal of the Korean Vacuum Society-
dc.subjectself-ion assisted beam source-
dc.subjectunvala scheme-
dc.subjectelectrostatic focusing-
dc.subjectCu thin film-
dc.titleDesign of self-ion assisted beam source (SIAB) based on electron focusing with concentric symmetrical electric field and Cu thin film growth by SIAB-
dc.typeArticle-
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