Assessment of dry etching damage in permalloy thin films

Title
Assessment of dry etching damage in permalloy thin films
Authors
김성동이정중임상호김희중
Keywords
dry etching damage
Issue Date
1999-04
Publisher
Journal of applied physics
Citation
VOL 85, NO 8, 5992-5994
URI
http://pubs.kist.re.kr/handle/201004/18104
ISSN
0021-8979
Appears in Collections:
KIST Publication > Article
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