Effects of boron implantation on the structural and diffusion barrier properties of W-N thin film

Title
Effects of boron implantation on the structural and diffusion barrier properties of W-N thin film
Authors
박영균김용태김동준박종완
Keywords
diffusion barrier
Issue Date
1999-03
Publisher
제 46 회 응용물리학관계연합강연회 강연예고집
Citation
VOL 2, NO 2, 887-887
URI
http://pubs.kist.re.kr/handle/201004/18116
Appears in Collections:
KIST Publication > Conference Paper
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