Fabrication and estimation of characteristics for Nb-silicide FEAs

Title
Fabrication and estimation of characteristics for Nb-silicide FEAs
Authors
박재석이상조주병권장진전동렬오명환
Keywords
FED; FEA; MEMS
Issue Date
1999-03
Publisher
Proc. ASID '99
Citation
, 49-52
URI
http://pubs.kist.re.kr/handle/201004/18119
Appears in Collections:
KIST Publication > Conference Paper
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