Enhancing defect-related photoluminescence by hot implantation into SiO ₂ layers

Title
Enhancing defect-related photoluminescence by hot implantation into SiO ₂ layers
Authors
S. ImJ. Y. JeongM. S. OhH. B. KimK. H. ChaeC. N. Whang송종한
Keywords
hot implantation
Issue Date
1999-02
Publisher
Applied physics letters
Citation
VOL 74, NO 7, 961-963
URI
http://pubs.kist.re.kr/handle/201004/18162
ISSN
0003-6951
Appears in Collections:
KIST Publication > Article
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